Sponge like Porous Silicon Formation for Integrated Electroluminescence Light Emitting Devices

Abstract

Integration of electronic and optoelectronic components on a silicon chip is the task of great importance. One of the most difficult optoelectronic element to integrate onto a Si chip is a light emitting device because Si is an indirect band gap semiconductor. In this paper we described the stable and reproducible method for high porosity silicon formation in novel ammonia fluoride solution.